State Space System Identification of 3-Degree-of-Freedom (DOF) Piezo-Actuator-Driven Stages with Unknown Configuration

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State Space System Identification of 3-Degree-of-Freedom (DOF) Piezo-Actuator-Driven Stages with Unknown Configuration

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ژورنال

عنوان ژورنال: Actuators

سال: 2013

ISSN: 2076-0825

DOI: 10.3390/act2010001