State Space System Identification of 3-Degree-of-Freedom (DOF) Piezo-Actuator-Driven Stages with Unknown Configuration
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چکیده
منابع مشابه
State Space System Identification of 3-Degree-of-Freedom (DOF) Piezo-Actuator-Driven Stages with Unknown Configuration
Due to their fast response, high accuracy and non-friction force, piezo-actuators have been widely employed in multiple degree-of-freedom (DOF) stages for various nano-positioning applications. The use of flexible hinges in these piezo-actuator-driven stages allows the elimination of the influence of friction and backlash clearance, as observed in other configurations; meanwhile it also causes ...
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ژورنال
عنوان ژورنال: Actuators
سال: 2013
ISSN: 2076-0825
DOI: 10.3390/act2010001